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Pneumatic Pump
Photoresist Dispensing Pump PDS-H115
- Type:Pneumatic Pump
- CAS No:
- Qty in 20' FCL:
- Min. Order:
- Packaging:
Save Big Now, Discount Expires Soon.
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Specification
Model
PDS-H115
Max. discharge capacity
12 mL/shot *
Max. discharge pressure
1.0 MPa
Discharge speed
0.5 to 2.0 mL/sec
Suction speed
0.3 to 2.0 mL/sec
Max. Allowable Viscosity
10,000 mPa·S
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Substantial saving of resist
The use of a high-torque stepper motor as the drive source results in a consistent discharge volume, unimpeded by filter clogging or viscosity change. A repeatable accuracy (0.3%) of discharge is maintained.
･ Repeated precision: ±0.3% (F.S.)
･ Linearity: ±0.5% (F.S.)
･ Resolution: 0.01 ml or below
Contamination free
The pump portion is of tubephragm structure wetted internals are flat and smooth, with a small dead volume. Because the system hardly has a place that allows liquid resist to dwell, production of particles is prevented.
Usable for a variety of coating processes
Since the discharge velocity can be changed freely in a shot, the system is capable of dealing with a variety of resist coating processes including application of a very small amount or in a very short period of time.
Reduction of Downtime
A discharge amount and a discharge time can be set only by entering values in the controller. It can save operator’s time and labor and reduce downtime.
